Photoresist Spin Coating Machine

A photoresist spin Coater uses high-speed rotation of the substrate to evenly spread photoresist across the surface via centrifugal force, forming a thin film. It is used in the photoresist coating process in semiconductor manufacturing to ensure consistent coating thickness and surface flatness.
Selection
When selecting, consider substrate size compatibility, spin speed control accuracy, coating uniformity repeatability, exhaust system configuration, and the range of process parameter adjustments. It must match the film thickness requirements of the specific process and the production environment conditions.

Terms

Instruments

Miniaturized design equipped with precision motor, the highest Rotation speed of 10000rpm, Acceleration range of 100-5000rpm/s, support 5 Linear dispersion storage function, transparent cavity easy to observe the coating process.

$ 1461.00

Rotation speed up to 8000rpm, support program-controlled homogeneous gel Linear dispersion storage, miniaturized design saves space, suitable for a variety of substrate coating.

$ 2090.00

Adopt precision motor to achieve 10000rpm Rotation speed, support 5 segments Linear dispersion preset, equipped with 7 inch touch screen to simplify operation, suitable for diaMeter ≤ 8 inch substrate, ensure uniform coating of film.

$ 2494.00

Precision motor to ensure uniform film formation, Speed range 0-10000rpm, Acceleration 100-5000rpm/s, Support preset Linear dispersion and touch screen operation, simplify the use process.

$ 2752.00

Support 0~ 10000rpm Rotation speed and 200 ℃ heating, with 5-stage uniform glue Linear dispersion programming function, PTFE cavity with dry mechanical pump to ensure process Stability.

$ 5560.00

Speed range 0~ 10000rpm, heating temperature up to 200 ℃, using touch screen preset uniform glue Linear dispersion, support diaMeter ≤ 8 inches substrate, simplify the operation process to improve the uniformity of film formation.

$ 6205.00

Speed range 0~ 10000rpm, heating temperature up to 200 ℃, using intelligent temperature control and touch screen preset uniform glue Linear dispersion, simplify the operation process and ensure film uniformity.

$ 6205.00

Miniaturized design combines aluminum alloy structure with 304 stainless steel cavity, maximum Rotation speed of 8000 rpm, supports programmable homogenization and storage of multiple Linear dispersion, suitable for substrates with a diaMeter of ≤ 4 inches.

$ 1445.00

Miniaturized design with PP cavity, Rotation speed up to 8000 rpm, Linear dispersion storage, suitable for diaMeter ≤ 4 inch substrate, easy to operate.

$ 1606.00

The Spin Coater is controlled by touch screen, the acceleration range is 100~ 4000rpm/s, and the speed can be automatically corrected by A/K selection. The motor torque is large and the operation is smooth, which is suitable for the assembly line process.

$ 2494.00

The uniform glue time is up to 3000 seconds, the speed range is 100-10000rpm, and the acceleration is 100-10000rpm/s. The solenoid valve is used to control the air path, which is suitable for assembly line processes. The motor torque is large and the operation is smooth.

$ 1364.00

Gluing time up to 3000 seconds, speed range of 100 to 10000rpm, acceleration of 100-10000rpm/s, support Vacuum chuck and solenoid valve control gas path, suitable for assembly line process.

$ 1590.00

The homogenizing time is up to 3000 seconds, the speed range is 100-10000rpm, and the acceleration is 100-10000rpm/s. It supports multi-stage program control. Vacuum chuck ensures the stability of the substrate and is suitable for assembly line processes.

$ 1493.00

Adopt swirl/spin friction surface contact method, equipped with 1 pair of abrasive wheels, working disc Rotation speed 60/72rpm, load range 250-1000g, support LCD counting, in line with many international standards.

$ 1526.00

High homogenizing efficiency, support 1-5 stage program control, 3000 seconds per period, speed range 100-10000rpm, acceleration 100-10000rpm/s, solenoid valve control gas path suitable for assembly line process.

$ 1461.00

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