Measurement principle
Roughness measuring instruments are divided into contact type (stylus type) and non-contact (optical type) according to the contact mode between the sensor and the sample. The contact type slides along the surface through the diamond stylus and converts the vertical displacement into an electrical signal. The non-contact method uses optical interference, confocal or laser triangulation to collect surface topography. Before selection, it is necessary to clarify the properties of the material to be measured, the surface condition, and the measurement environment. For example, soft or scratchable materials should be prioritized for non-contact; High-precision datum or deep groove samples are more suitable for contact type.
Reference criteria and data comparability
Common domestic standards include GB/T 3505 (surface structure contour method) and GB/T 6062 (needle tracing method), and foreign references are ISO 4287 and ISO 25178. Contact measurement follows the contour method standard and outputs two-dimensional parameters such as Ra and Rz. Non-contact is based on regional standards (ISO 25178) and can output 3D parameters such as Sa and Sz. It should be noted that the data measured by the two types of instruments on the same sample have deviations, and it is not suitable to mix them directly. If it needs to be compared with historical data, the same principle instrument should be selected.
Formula example: The formula for calculating arithmetic average roughness is
Ra = (1/L) ∫0L |Z(x)| dx
Contact vs. non-contact comparison
| Comparative dimensions | Brief description |
|---|---|
| Measurement principle | The stylus is in direct contact with the surface and records the mechanical displacement |
| Vertical resolution | Typically up to 0.5 nm~10 nm, limited by probe curvature |
| Applicable materials: | Metals, ceramics, hard plastics, and materials that are not resistant to scratches should be cautious |
| Measure efficiency | Line-by-line scanning, slower speed, suitable for local high precision |
| Environmental impact | It has strong anti-vibration and oil stain resistance, and is not sensitive to temperature changes |
| Data dimensions | The two-dimensional contour parameters are the main ones, and some can be spliced into three dimensions |
| Typical applications: | Calibration of machining surfaces, bearings, molds, and measuring tools |
| Main limitations | Cannot measure soft, viscous, steep sidewalls, and ultra-precise optical surfaces |
| Contactless | Brief description |
|---|---|
| Measurement principle | Based on the principles of light interference, confocal or laser scattering |
| Vertical resolution | Up to the 0.1 nm level, limited by optical diffraction limits |
| Applicable materials: | Suitable for almost all transparent, opaque and flexible materials |
| Measure efficiency | Fast surface scanning can obtain 3D topography data |
| Environmental impact | Sensitive to vibration, stray light, surface reflectivity |
| Data dimensions | Both 3D area parameters and contour parameters can be obtained |
| Typical applications: | Semiconductor wafers, optical components, flexible films, paper, coatings |
| Main limitations | Measurements on highly reflective or deep-hole surfaces are prone to distortion and costly |
Key points of selection decision-making
First, evaluate whether the surface under test allows physical contact. If allowed and requires a high degree of repeatability and standard traceability, contact is a safe choice. If the sample is soft, light-transmitting or easily deformed, non-contact should be selected. Secondly, the measurement parameters are considered: only Ra/Rz is sufficient for contact; If 3D texture parameters (such as Sa, Ssk, Sku) are required, contactless is more reasonable. In addition, environmental factors also need to be weighed: there is oil pollution and vibration in the on-site production line environment, and the contact type is more reliable; The advantages of cleanroom optical method are obvious.
Comprehensive considerations and suggestions
Budget permitting, two principle instruments can be configured at the same time to handle different samples. When purchasing, the supplier is required to provide the measured comparison data on similar samples, and indicate the standard and filter conditions used. Attention should be paid to the calibration cycle after the contact stylus wear, as well as the periodic verification of the non-contact standard mirror. Choose an instrument that meets the actual measurement needs and standards to ensure data validity and long-term availability.
Reference source
1. Surface structure contour method standard, National Standards Technical Committee. 2. Surface texture area method measurement terminology standard. 3. Research report on contact and non-contact roughness measurement comparison, industry technical journal. 4. Major measuring instrument manufacturers publish technical descriptions.
