Overview
WH-SC-01 spin Coater is a Benchtop Spin Coater suitable for semiconductor process, plate making and surface coating. The product can be used in scientific research, teaching and other institutions, with independent intellectual property rights, to ensure the conformity and uniformity of film thickness.
Features
1. Adopt full Touchscreen control, easy to operate.
2. Rotation speed with three gears, Rotation speed and corresponding time are adjustable, to achieve controllable start and stop.
3. Rotation speed is displayed in real time for easy observation.
4. Configure "safety switch", close the upper cover and start automatically when running at high speed, and the upper cover cannot be opened during operation to provide Safety protection.
5. Suitable for the homogenization of φ 28~ φ 200mm silicon wafers and Miscellaneous materials.
Principle
The instrument drives the sample stage swirl/spin through a motor. After starting, the glue is homogenized at low speed to make the glue initially spread; then switch to high speed to throw the glue, and use centrifugal force to throw the excess glue out, so as to form a uniform film on the surface of the substrate. Rotation speed and time can be set independently to control the thickness and uniformity of the film.
Applications
Semiconductor technology, plate making, surface coating, scientific research, teaching
Steps
1. Set the required Rotation speed and time parameters through Touchscreen.
2. Place the substrate to be coated (e.g. silicon wafer) on the sample stage.
3. Add an appropriate amount of glue dropwise.
4. Close the upper cover of the instrument and trigger the safety switch.
5. Start the instrument, the instrument will first homogenize the glue at low speed according to the preset program, and then throw the glue at high speed.
6. After running, open the upper cover and remove the sample.
Notice
• The instrument needs to work in an environment with a temperature of 0~ 40 ° C and a relative humidity < 80%.
• Power supply voltage is AC220V +/- 10V, 50HZ, please ensure that the power supply meets the requirements.
• When running at high speed, be sure to close the upper cover, and do not forcibly open it after the safety switch is started.
• According to the process requirements, an oil-free vacuum pump can be purchased as an option to fix the substrate.
