Overview
12Az homogenizer is a liquid crystal display experimental homogenizer of Huinuo brand, which is used to coat films, glue solutions or Miscellaneous liquid materials on the surface of substrates. The equipment works based on the principle of centrifugal force, homogenizing time 0~ 240s, equipped with four-stage speed controller, optional Vacuumpump. Widely used in semiconductor manufacturing, Optical inspection coating, material science and other fields, especially in photoresist Spreader, boron coating and other processes.
Features
1. High homogenizing efficiency and easy to use
2. The glue speed and time are divided into multiple periods and can be adjusted steplessly
3. The electrical wiring is reliable, the motor runs smoothly, and the motor torque is large
4. The suction piece adopts a solenoid valve to control the air passage, which is suitable for assembly line process
5. High coating uniformity, high mass film or coating by centrifugal force
6. Strong process controllability, providing a wealth of parameter adjustment options
7. Widely used, suitable for photoresist and Miscellaneous glue coating
8. Wide swirl/spin speed range, adjustable from low speed to high speed
9. Equipped with vacuum adsorption system to ensure stable fixation of the substrate
10. Provides automatic control options that can be programmed to preset coating parameters
Principle
The working principle of the homogenizer is to drop the glue on the swirl/spin substrate, and then make the glue evenly distributed on the surface of the substrate through the swirl/spin movement to form a film or coating. Centrifugal force will spread the glue from the center to the outer boundary, and finally form a uniform coating. Parameters such as swirl/spin speed and time of the homogenizer and viscosity of the glue will affect the film thickness and uniformity of the film or coating.
Applications
Semiconductor manufacturing, Optical inspection coatings, Materials science, Photoresist Spreader, Boron coating process, polymer coatings, film prepatives
Steps
1. Place the substrate on the homogenizer tray
2. Start the vacuum adsorption system to fix the substrate
3. Select the preset coating parameters through program control
4. Drop the glue on the swirl/spin substrate
5. Set swirl/spin speed and time parameters
6. Start the homogenizing process for coating
7. Remove the substrate after completing the coating
Notice
• Power supply voltage meets AC200-230V requirement before operation
• Check whether the vacuum adsorption system is working properly before use
• Choose the appropriate loading size according to the diameter of the substrate
• Confirm the viscosity and drop position parameters before coating
• Avoid touching moving parts during swirling/spinning
• Regularly check the running status of the motor and electrical wiring
• When multiple devices share an air pump, the air path needs to be reasonably allocated
• Pay attention to the time allocation of each speed segment when setting the program
