Overview
The spin Coater is a device based on the principle of centrifugal force for coating thin films, glues or Miscellaneous liquid materials on the surface of substrates. It has important applications in semiconductor manufacturing, Optical inspection coatings, materials science and other fields. The 12Azc laboratory spin Coater is an experimental device equipped with a touch display screen. It has fixed Acceleration, can automatically correct the Rotation speed by A/K selection Kx practice run, and can be equipped with an optional vacuum pump. Compact size.
Features
1. High uniform glue efficiency, easy to use.
2. The glue speed and time are divided into multiple periods and can be adjusted steplessly.
3. The electrical wiring is reliable, the motor runs smoothly, and the torque is large.
4. The suction plate adopts a solenoid valve to control the air path, which is suitable for the assembly line process. An air pump can drive multiple spinning Coaters to work at the same time to improve efficiency.
5. Good coating uniformity, can achieve high mass film or coating.
6. Strong process controllability, providing a wealth of parameter adjustment options.
7. Widely used, suitable for the coating of various liquid materials such as photoresist and polymer coating.
8. Wide swirl/spin speed range (100~ 7000rpm) to meet different coating requirements.
9. Vacuum chuck system is optional to ensure that the substrate is stable and fixed during swirling/spinning.
10. Provides automatic control options that can be programmed to preset coating parameters.
Principle
The Working Principle of spin Coater is that the glue droplets on the swirl/spin substrate, and the centrifugal force generated by the swirl/spin motion diffuses the glue from the center to the outer boundary, so that it is evenly distributed on the surface of the substrate to form a film or coating. The thickness and uniformity of the film are affected by parameters such as swirl/spin speed, time and glue viscosity.
Applications
Semiconductor manufacturing, Optical inspection coatings, Materials science, Photoresist Spreaders, Boron coating, Film prepatives, polymer coatings