Overview
The homogenizer is a device used for coating film, glue solution or Miscellaneous liquid material on the surface of the substrate. Its working principle is based on centrifugal force. The homogenizer has important applications in semiconductor manufacturing, Optical inspection coating, material science and other fields, especially in the preparation of film, coating photoresist and other processes. 12E spin coating homogenizer is a touch screen control, using reliable motor, driver, suction plate adopts solenoid valve to control the air passage. The homogenizer time is 3000s, the speed is 100-10000, and the acceleration is 100-10000.
Features
1. High homogenizing efficiency and easy to use
2. The glue speed and time are divided into multiple periods and can be adjusted steplessly
3. Reliable electrical wiring, smooth motor operation, especially large motor torque, better than congeneric products
4. The suction sheet adopts a solenoid valve to control the air path, which is suitable for assembly line process. One air pump can work with several glue levelers at the same time, which improves the efficiency
5. High coating uniformity, capable of achieving high-mass films or coatings
6. Strong process controllability, providing a wealth of parameter adjustment options
7. Widely used, suitable for photoresist Spreader, boron coating and other processes
8. Wide swirl/spin speed range, adjustable from low speed to high speed
9. Equipped with vacuum adsorption system to ensure that the substrate is firmly fixed on the tray
10. Provides automatic control options that can be programmed to preset coating parameters
Principle
The working principle of the homogenizer is to drop the glue on the swirl/spin substrate, and then make the glue evenly distributed on the surface of the substrate through the swirl/spin movement to form a film or coating. Centrifugal force will spread the glue from the center to the outer boundary, and finally form a uniform coating. Parameters such as swirl/spin speed and time of the homogenizer and viscosity of the glue will affect the film thickness and uniformity of the film or coating.
Applications
Semiconductor manufacturing, Optical inspection coatings, Materials science, Photoresist Spreader, Boron coating process, Film prepatives, polymer coatings
Steps
1. Place the substrate on the homogenizer tray
2. Fixed substrate by vacuum adsorption system
3. Set swirl/spin speed, swirl/spin time and other parameters on the touch screen
4. Drop the glue on the swirl/spin substrate
5. Start the device for the coating process
6. Remove the substrate after waiting for the coating to be completed
Notice
• Power supply voltage should be checked before operation (AC180-240V or AC90-130V)
• Ensure that the Vacuumpump is working properly, and the vacuum input requirement is 0.06-0. 09MPa
• Select the appropriate loading diameter (10/20/30... 100mm)
• Adjust process parameters such as swirl/spin speed and swirl/spin time according to specific needs
• Ensure that the viscosity of the glue is suitable for the coating requirements
• Regularly check the running status of the equipment to ensure the smooth operation of the motor
• Use a suitable vacuum flow rate, minimum 15 liters/Min or more
