Overview
The homogenizer is a device based on the principle of centrifugal force for coating film, glue or Miscellaneous liquid material on the surface of the substrate. The Huino 12Ez homogenizer adopts touch screen control, is equipped with reliable motor and driver, and the solenoid valve controls the air suction sheet. The homogenizer time reaches 3000 seconds. The rotational speed range is 100-10000rpm and the acceleration is 100-10000rpm/s. The device is widely used in semiconductor manufacturing, Optical inspection coating, material science and other fields, especially suitable for photoresist Spreader and boron coating process. The homogenizer contains single head, multi head, single speed, multi speed and other series to meet different customer needs.
Features
1. High homogenizing efficiency and easy to use
2. The glue speed and time are divided into multiple periods, stepless and adjustable
3. Reliable electrical wiring, smooth motor operation, torque is better than congeneric products
4. The suction plate adopts a solenoid valve to control the air path, which is suitable for assembly line process. One air pump can carry multiple devices
5. Good coating uniformity, high mass film achieved by centrifugal force
6. Strong process controllability, providing a wealth of parameter adjustment options
7. Wide range of applications, suitable for all kinds of glue and liquid materials
8. Wide swirl/spin speed range to meet different coating requirements
9. Equipped with vacuum adsorption system to ensure stable fixation of the substrate
10. Support automatic control, programmable preset coating parameters
Principle
By dropping the glue on the swirl/spin substrate, the centrifugal force generated by the swirl/spin movement is used to diffuse the glue from the center to the boundary, and form a film or coating evenly on the surface of the substrate. Parameters such as swirl/spin speed, time and glue viscosity directly affect the film thickness and uniformity.
Applications
Semiconductor manufacturing, Optical inspection coatings, Materials science, Photoresist Spreader, Boron coating process, polymer coatings, film prepatives
Steps
1. Select the appropriate loading diameter (10-100mm)
2. Set 1-5 segment program control through the touch screen
3. Preset each period of time (up to 3000 seconds) and speed parameters (100-10000rpm)
4. Adjust the acceleration range (100-10000rpm/s)
5. Start the vacuum adsorption system to fix the substrate
6. Start the homogenizing program
Notice
• Power supply voltage must be within the range of AC180-250V single phase
• Vacuum input requirement 0.06-0 MPa, minimum flow rate of 15 l/min
Equipment weight 8kg, need to pay attention to safety when handling
• Dimension 230 * 265 * 150mm (excluding pot height), leave enough space during installation
• The height of the motor shaft is 40mm, and the substrate needs to be installed correctly when using it.
• The vacuum interface is a 6mm tube, which needs to be connected correctly to the Vacuumpump.
