Overview
The homogenizer is a device used for coating film, glue solution or Miscellaneous liquid material on the surface of the substrate. Its working principle is based on centrifugal force. The homogenizer has important applications in semiconductor manufacturing, Optical inspection coating, material science and other fields, especially in the processes of preparing film, coating photoresist and so on. The 16E spin coating homogenizer is a touch screen control, using reliable motors and drivers. The suction sheet adopts solenoid valve to control the air passage. The homogenizer time is 3000s, the speed is 100-10000, and the acceleration is 100-10000.
Features
1. High homogenizing efficiency and easy to use
2. The glue speed and time are divided into multiple periods and can be adjusted steplessly
3. The electrical wiring is reliable, the motor runs smoothly, and the motor torque is large
4. The suction piece adopts a solenoid valve to control the air passage, which is suitable for assembly line process
5. Good coating uniformity and strong process controllability
6. Wide swirl/spin speed range, stable vacuum adsorption
7. Automatic control options are provided, and coating parameters can be preset by programming
Principle
The working principle of the homogenizer is to drop the glue on the swirl/spin substrate, and then make the glue evenly distributed on the surface of the substrate through the swirl/spin movement to form a film or coating. Centrifugal force will spread the glue from the center to the outer boundary, and finally form a uniform coating. Parameters such as swirl/spin speed and time of the homogenizer and viscosity of the glue will affect the film thickness and uniformity of the film or coating.
Applications
Semiconductor Manufacturing, Optical inspection coatings, Materials Science, Photoresist Spreaders, Boron Coating, polymer coatings, film prepatives
Standards
Global voltage AC90-250V, 50-60 Hz
Steps
1. Select the loading diameter
2. Set program control parameters
3. Adjust the homogenizing time and speed
4. Start the vacuum adsorption system
5. Start the swirling/spinning coating process
Notice
• Power supply voltage meets requirements
• Vacuum input pressure should be kept within the range of 0.06-0
• The minimum vacuum flow rate needs to reach more than 15 liters/minute
• Adjust swirl/spin speed, time and acceleration parameters according to specific application requirements
Make sure the substrate is firmly attached to the tray
