Overview
The Huino 16Ez homogenizer is a device based on the principle of centrifugal force for coating film, glue or Miscellaneous liquid materials on the surface of substrates. The device has important applications in the fields of semiconductor manufacturing, Optical inspection coatings and materials science, especially suitable for processes such as photoresist Spreader and boron coating. The 16Ez model adopts touch screen control, supports global voltage AC90-250V, is equipped with reliable motor and driver, homogenizing time up to 3000 seconds, speed range 100-10000rpm, acceleration 100-10000rpm/s.
Features
1. High uniform glue efficiency, easy to use.
2. The glue speed and time are divided into multiple periods, stepless and adjustable.
3. The electrical wiring is reliable, the motor runs smoothly, and the torque is high.
4. The suction plate adopts a solenoid valve to control the air path, which is suitable for assembly line processing. One air pump can work with multiple glue levelers.
5. The coating uniformity is good, and the process parameters are controllable.
6.Wide swirl/spin speed range, support vacuum adsorption and automatic control.
Principle
By dropping the glue on the swirl/spin substrate, the glue is diffused outward from the center by centrifugal force to form a film or coating evenly on the surface of the substrate. Parameters such as swirl/spin speed, time and glue viscosity affect the film thickness and uniformity of the coating.
Applications
Semiconductor manufacturing, Optical inspection coatings, Materials science, Photoresist Spreader, Boron coating process, polymer coatings, film prepatives
Steps
1. Place the substrate on the tray and fix it by vacuum adsorption.
2. Set up the program on the touchscreen, including parameters such as swirl/spin speed, time, and acceleration.
3. Drop the glue on the surface of the substrate.
4. Start the device and proceed with the swirl/spin coating process.
5. Remove the substrate after completion.
Notice
• Power supply voltage in the range of AC90-250V.
• The vacuum input requirement is 0.06-0 MPa, and the minimum flow rate is 15 liters/minute.
• Select the appropriate tray according to the diameter of the substrate.
• Consider the viscosity and application requirements of the glue when adjusting the process parameters.
• Regularly check the running status of the motor and solenoid valve.
