Overview
The spin Coater is a device for coating films, glue solutions or Miscellaneous liquid materials on the surface of substrates. Its Working Principle is based on centrifugal force. The device has important applications in semiconductor manufacturing, Optical inspection coatings, material science, etc., especially in the processes of preparing films, coating photoresists, etc. The 12AC spin Coater is an experimental spin Coater for touch display screens. Acceleration can be adjusted digitally, with a range of 100~ 4000rpm/s. Rotation speed can be automatically corrected by A/K selection Kx practice run. Optional vacuum pump.
Features
1. High uniform glue efficiency, easy to use.
2. The glue speed and time are divided into multiple periods and can be adjusted steplessly.
3. The electrical circuit is reliable, the motor runs smoothly, and the torque is large, which is better than congeneric products.
4. The suction plate adopts a solenoid valve to control the air path, which is suitable for the assembly line process. An air pump can work with several spinning Coaters at the same time to improve efficiency.
5. High coating uniformity, high mass film or coating is achieved by centrifugal force.
6. Strong process controllability, providing a wealth of parameter adjustment options.
7. Widely used, suitable for photoresist coating and Miscellaneous glue, liquid materials.
8. Wide swirl/spin speed range, adjustable from low speed to high speed.
9. Equipped with Vacuum chuck system to ensure stable fixation of the substrate.
10. Provides automatic control options that can be programmed to preset coating parameters.
Principle
The Working Principle of spin Coater is to form a film or coating by dropping the glue on a swirl/spin substrate, and then distributing the glue evenly on the surface of the substrate through swirl/spin motion. Centrifugal force will diffuse the glue from the center to the outer boundary, eventually forming a uniform coating. Parameters such as swirl/spin speed, time, and viscosity of the glue will affect the thickness and uniformity of the film or coating.
Applications
Semiconductor Manufacturing, Optical inspection coatings, Materials Science, Photoresist Spreaders, Boron Coating, polymer coatings, film prepatives
Steps
1. Rotation speed can be automatically corrected by selecting Kx practice run through A/K.
2. Adjust swirl/spin speed, time and other parameters.
3. Use Vacuum chuck system to fix the substrate.
4. Add glue dropwise and start the swirl/spin coating process.
Notice
• Power supply voltage AC200-230V, single phase, 200W.
• The vacuum input requirement is 0.06-0 MPa, and the vacuum Flow rate is above 40 liters/Min.
• Check the vacuum interface and piping connection before use.
• Adjust process parameters such as swirl/spin speed, time, etc. according to the specific application.
• Device weight, spin Coater 14KG, optional vacuum pump 5KG.