Overview
This heating type spin Coater mainly uses the principle of centrifugal coating to coat liquid or colloidal materials on silicon wafers, crystals, quartz, ceramics and other substrates to form films. This process has a wide range of applications in the field of materials research. The working cavity of this heating type spin Coater is made of polytetrafluoroethylene (plastic king) material, which has excellent chemical Stability and strong corrosion resistance, and has been widely used in various occasions that require acid and alkali resistance and organic solvents.
Features
1. Using PTFE (Plastic King) material cavity, with excellent Chemical Stability and strong corrosion resistance
2. Installed with Vacuum Digital Sensor, real-time detection of system Vacuum Level during coating process
3. The controller must be at the appropriate Vacuum Level before the motor can start and run normally, reliably suck and prevent flyer accidents
4. Heating temperature up to 200 ℃, using AIP Intelligent Temperature control mode
5. Equipped with 7-inch high definition LCD touch screen man-machine interface
6. Support manual glue drop, optional precision syringe pump
7. Linear dispersion 5 segments per Linear dispersion, a total of 5 Linear dispersion can be stored
8. Speed range 0~ 10000rpm, Acceleration 100~ 5000rpm/s, Rotation speed resolution 1rpm
9. Supports substrate processing with a diameter of ≤ 8 inches (200mm)
Principle
The heated spin Coater mainly uses the principle of centrifugal coating to uniformly coat liquid or colloidal materials on the substrate to form a thin film through the centrifugal force generated by the motor swirl/spin. During the coating process, the Vacuum Level real-time detection system of the vacuum digital Sensor is used to ensure that the motor starts and runs normally at the appropriate Vacuum Level, so as to achieve reliable suction and prevent flying film accidents.
Applications
Materials research, wafer processing, crystal processing, quartz substrates, ceramic substrates
Standards
Power supply voltage AC220V, 50Hz
Steps
1. Place the substrate in the spinning Coater cavity
2. Establishing Appropriate Vacuum Levels with a Vacuum System
3. Manually drop glue or use a precision syringe pump to add liquid or colloidal materials
4. Linear dispersion parameters (Rotation speed, Acceleration, Time, etc.)
5. Start the motor for centrifugal coating
6. Stop the device after finishing the coating and remove the substrate
Notice
The Motor Must Be at the Appropriate Vacuum Level to Start and Run
• Substrate size must not exceed 8 inches (200mm) in diameter
• Heating temperature must not exceed 200 ° C
• Power supply voltage AC220V, 50Hz before use
• Regularly check the working status of the vacuum system
• Pay attention to safety protection during operation
