Product Overview
This device is specially designed for thin film preparation in the fields of advanced materials, microelectronics, optical coatings, etc. Using High Accuracy digital motor and intelligent program control system, it can stabilize the uniform thin film of nanometer to micron film thickness on various planar substrates such as silicon wafer, Glass, Pottery and porcelain, metal, flexible film, etc. Corrosion-resistant cavity with humanized interface, suitable for laboratory research and development and pilot production scenarios.
Product Features
1. High uniformity, good repeability: the speed accuracy of +/- 1 rpm, the acceleration can be precisely adjusted, help to maintain the conformity of the film between batches.
2. Intelligent program control, process curing: Support up to 20 sets of program storage, each set can be set to 5 independent speed and acceleration, commonly used formula one-click call, reduce human error.
3. Strong compatibility, one machine multi-purpose: standard multi-size vacuum sheet holder, covering small size substrates to 8-inch substrates; optional high temperature cavity to achieve "spin coating + baking glue" integration process.
4. Multi-protection, safe operation: Equipped with multiple safety mechanisms such as automatic shutdown with open lid and vacuum pressure alarm to enhance the safety of equipment operation.
Working Principle
The equipment is driven by High Accuracy digital motor, and the speed and acceleration are precisely controlled by intelligent program control system. The substrate is fixed on the vacuum sheet holder, and the centrifugal force is used to spread the Spreader liquid evenly on the surface of the substrate to form a film of nano to micron thickness. Corrosion-resistant cavity design ensures process stability.
application field
Semiconductors, new energy, materials science, biomedicine
Meet the standard
No mention yet.
Operation steps
1. Place the substrate on the vacuum sheet holder and fix it.
2. Select or set process parameters (e.g. speed, acceleration, number of segments, etc.) through the intelligent program control system.
3. Start the device and start the Spreader process.
4. After completion, turn off the device and remove the substrate.
5. If necessary, optional high temperature cavity for "spin coating + baking glue" integration process.
Precautions
Make sure the equipment is properly installed and check the vacuum system before operation.
Verify that the substrate size matches the sheet holder before use.
Avoid running the device with the lid open to prevent accidents.
- Pay attention to monitoring the vacuum pressure and stop the machine in time if any abnormalities are found.
- Regularly clean the cavity to prevent residues from affecting the coating mass.
- Only for use in laboratories or pilot production scenarios.
Follow the safety guidelines in the equipment manual.
