Product Overview
This device is specially designed for thin film preparation in the fields of advanced materials, microelectronics, optical coatings, etc. Using High Accuracy digital motor and intelligent program control system, it can stabilize the uniform thin film of nanometer to micron film thickness on various planar substrates such as silicon wafer, Glass, Pottery and porcelain, metal, flexible film, etc. Corrosion-resistant cavity with humanized interface, suitable for laboratory research and development and pilot production scenarios.
Product Features
1. High uniformity, good repeatability, speed accuracy up to +/- 1 rpm, acceleration can be precisely regulated. 2. Intelligent program control, process curing, support up to 20 sets of program storage, each group can be set to 5 independent speed and acceleration. 3. Strong compatibility, one machine multi-purpose, standard multi-size vacuum sheet holder, covering small size substrate to 8 inch substrate; optional high temperature cavity to realize "spin coating + baking glue" integrated process. 4. Multiple protection, safe operation, equipped with multiple safety mechanisms such as automatic shutdown when opening the lid, vacuum pressure alarm, etc.
Working Principle
Driven by High Accuracy Digital Motor, the rotational speed and acceleration are precisely controlled by intelligent program control system, and spin coating is realized on the planar substrate of Vacuum chuck, so as to prepare a uniform film.
application field
Semiconductor field, new energy field, materials science, biomedicine
Operation steps
No information yet
Precautions
- No information yet
