| Measurement Range |
0~1000ml/min/0.01μm/(pa.s)~100μm/(pa.s)
|
0-17μm/(Pa.s) / (0-1000ml/min)
|
| test area |
Standard specimen test is 10 +/- 0.2cm ²
|
10.0±0.05cm
|
| Differential pressure in test area |
Standard test pressure difference is 1 +/- 0.01kpa
|
|
| Measurement accuracy |
< 100Ml, error 1ml; > 100ml, error 5ml
|
|
| Inner diameter of clamp ring |
Standard specimen clamping inner diameter 35.68 +/- 0.05mm
|
|
| Coaxiality of upper and lower clamp ring center hole |
Strictly control coaxiality deviation < 0.05mm
|
|
| Environmental conditions temperature |
(0~ 35) ℃, Humidity < 85%
|
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