Overview
The 54X trinocular industrial inspection microscope is an industrial microscope developed by SHANGGUANG for the semiconductor industry, silicon wafer manufacturing industry, electronic information industry, and metallurgical industry. It adopts an excellent infinity correction Optical inspection system with clear images and good contrast. It is equipped with a large moving range stage, an epiphany illuminator, a flat-field infinity long working distance Bright & Dark Field objective lens and a large field of view eyepiece, which can perform Bright & Dark Field, epiphany polarized light and differential interference observation. The Microscope trinocular tube can be connected to a camera device and a computer, and can be used as a microcomputer industrial inspection microscope with software.
Features
1. Optical inspection system with excellent infinity correction, clear image and good contrast.
Equipped with a large moving range stage (moving range 250 x 250mm), making it easy to observe large-sized samples.
3. Equipped with epiphany lighting system, with aperture light bar and field of view light bar, adjustable luminance.
4. Adopt flat-field infinite working distance Bright & Dark Field objective lens, long working distance, easy to operate.
5. Provide a five-hole objective lens converter with DIC, Bright & Dark Field jacks for easy function switching.
6. The focusing system adopts coarse fretting coaxial design, and the fretting grid value is fine (0.002mm).
7. Three-eyepiece tube design allows for easy connection of camera devices and computers, expanding into an image analysis system.
Principle
The microscope is based on an infinity-corrected Optical inspection system, where the rays of light pass through the objective lens to form a parallel beam of light, which passes through the barrel lens and then imagery. The epiphany illumination system provides Illuminant, the ray of light is irradiated to the sample surface through the objective lens, and the reflected light enters the optical path imagery through the objective lens. Switch the objective lens with different magnifications through the objective converter, and combine the Brightfield, Dark Field, Polarized Light or Differential Interference (DIC) plug-ins to change the illumination and imagery mode, so as to realize the observation and analysis of different characteristics of the sample surface.
Applications
Semiconductor industry, wafer manufacturing industry, electronic information industry, metallurgical industry, factories, research institutions, colleges and universities, monitoring and analysis for silicon wafers, circuit substrates, cracking exploration, and precision molds
Standards
The data did not mention specific compliance criteria.
Steps
1. Turn on the power of the falling illumination system and adjust the luminance.
2. Place the sample on the Glass bench and fix it.
3. Preliminary focusing is carried out by coarse fretting coaxial focusing handwheel.
4. Swirl/spin objective converter, select the objective with the desired magnification.
5. According to the observation requirements, move in or out of the polarizer, analyzer (polarizing observation) or DIC, dark field plug-in.
6. Fine adjust the micro-wheel until the image is clear.
7. If you need to record or analyze, connect the camera device to the computer through the three-eyepiece tube, and start the corresponding software for operation.
Notice
When moving the stage, please operate gently to avoid exceeding its moving range (250 x 250mm).
* When switching objectives, please use a swirl/spin converter instead of a direct zoom lens to avoid damaging the optical axis alignment.
* When adjusting the lighting luminance, do not turn the luminance to the highest instant to prolong the life of the halogen lamp.
When using a differential interference (DIC) or polarizing device, ensure that the corresponding plug-in is properly inserted into the optical path.
* Microscope weight about 35Kg, moving or handling should pay attention to safety, prevent dumping.
* When cleaning Optical inspection parts, please use special lens paper and detergent to avoid scratching the lens.
