GB/T 18867-2025
Electronic gas—Sulphur hexaflouride

GB/T 18867-2025 "Electronic Gases - Sulfur Hexafluoride" specifies the technical requirements, test methods, inspection rules, as well as packaging, labeling, transportation, and safety requirements for high-purity sulfur hexafluoride gas used in the electronics industry. This standard applies to sulfur hexafluoride gas used in fields such as electrical equipment and semiconductor manufacturing, and clearly defines its purity, impurity content (including moisture, acidity, etc.), and testing methods.

This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
Status Active
CCS G86 ICS 71.100.20
Release Date 2025-04-25 00:00:00 Implementation Date 2025-11-01 00:00:00