This standard establishes specifications for the application of high-purity nitrous oxide in the electronics industry. It primarily defines the technical requirements for such electronic gases, a unified sampling method, detailed inspection rules, and conditions for packaging, transportation, and storage, while also describing test methods for key indicators. At the detection level, the standard involves the analysis of nitrous oxide purity and impurities, which typically requires specialized gas analysis instruments, such as high-precision nitrous oxide analyzers utilizing technologies like non-dispersive infrared, gas filter correlation, or laser. The standard aims to ensure that electronic gases used in areas such as semiconductor manufacturing possess reliable and consistent quality.
| Status | Active | ||
|---|---|---|---|
| CCS | G86 | ICS | 71.100.20 |
| Release Date | 2025-04-25 00:00:00 | Implementation Date | 2025-11-01 00:00:00 |
